Sensors and Materials
Sensors and Materials
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Sensors and Materials  ISSN 0914-4935

Volume 19 (2007)
Number 1

Special Issue on Microvalves
Guest Editor, Albert K. Henning (Aquarian Microsystems/NanoInk, Inc.)

Research Reports

Development of MEMS-Based Piezoelectric Microvalve Technologies
Eui-Hyeok Yang, Choonsup Lee and J. M. Khodadadi
pp. 1-18

Pneumatic MEMS In-Channel Microvalves with In-Plane Control Ports for Micro Fluidic Systems Integrated on a Chip Surface
Hidekuni Takao and Makoto Ishida
pp. 19-34

Designing and Fabricating Electromagnetically Actuated Microvalves for MEMS Applications
J. Sutanto, R. Luharuka, P. J. Hesketh and Y. H. Berthelot
pp. 35-56

Electrostatically Driven 3-Way Silicon Microvalve for Pneumatic Applications
Stephan Messner, Jochen Schaible, Peter Nommensen and Roland Zengerle
pp. 57-78

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