Sensors and Materials
Sensors and Materials
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Sensors and Materials  ISSN 0914-4935

Volume 15 (2003)
Number 1

Special Issue on Physical Chemistry of Wet Etching of Silicon (1)
Guest Editor, Kazuo Sato (Nagoya University)

Review Report

Ultraprecision Machining based on Physics and Chemistry
Yuzo Mori, Kikuji Hirose, Kazuto Yamauchi, Hidekazu Goto, Kazuya Yamamura and Yasuhisa Sano
pp. 1-19

Research Reports

Nano-Mechanical Method for Seeding Circular-Shaped Etch Pits on (100) Silicon Surface
Mitsuhiro Shikida, Koji Kawasaki, Kazuo Sato, Yasuo Ishihara, Hiroshi Tanaka and Akihito Matsumuro
pp. 21-35

Evolution of Surface Roughness in KOH Etching of Silicon Caused by Material Defects
Eero Haimi and Veikko K. Lindroos
pp. 37-42

Effects of ppb-Level Metal Impurities in Aqueous Potassium Hydroxide Solution on the Etching of Si{110} and {100}
Hiroshi Tanaka, Yoshitsugu Abe, Kazuyuki Inoue, Mitsuhiro Shikida and Kazuo Sato
pp. 43-51

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