Sensors and Materials
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Sensors and Materials  ISSN 0914-4935

Volume 15 (2003)
Number 1

Special Issue on Physical Chemistry of Wet Etching of Silicon (1)
Guest Editor, Kazuo Sato (Nagoya University)


Review Report

S&M0505
Ultraprecision Machining based on Physics and Chemistry
Yuzo Mori, Kikuji Hirose, Kazuto Yamauchi, Hidekazu Goto, Kazuya Yamamura and Yasuhisa Sano
pp. 1-19
[Abstract]

Research Reports

S&M0506
Nano-Mechanical Method for Seeding Circular-Shaped Etch Pits on (100) Silicon Surface
Mitsuhiro Shikida, Koji Kawasaki, Kazuo Sato, Yasuo Ishihara, Hiroshi Tanaka and Akihito Matsumuro
pp. 21-35
[Abstract]


S&M0507
Evolution of Surface Roughness in KOH Etching of Silicon Caused by Material Defects
Eero Haimi and Veikko K. Lindroos
pp. 37-42
[Abstract]


S&M0508
Effects of ppb-Level Metal Impurities in Aqueous Potassium Hydroxide Solution on the Etching of Si{110} and {100}
Hiroshi Tanaka, Yoshitsugu Abe, Kazuyuki Inoue, Mitsuhiro Shikida and Kazuo Sato
pp. 43-51
[Abstract]





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