Sensors and Materials
Contents
 
  MYU
Sensors and Materials
1-23-3-303 Sendagi, Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3821-2930
Fax: 81-3-3827-8547
 




Sensors and Materials  ISSN 0914-4935

Volume 11 (1999)
Number 6

Taiwanese Special Issue
Guest Editor, Yao Cheng (Synchrotron Radiation Research Center)


Research Reports

S&M0375
Status of HARMST in Taiwan
Yao Cheng
pp. 319-327
[Abstract]


S&M0376
Manufacturing Processes for LIGA Spinnerets
B.-Y. Shew, Y. Cheng, C.-H. Lin, W.-P. Ma, G.-J. Huang, C.-L. Kuo, S.-C. Tseng, D.-S. Lee and G.-L. Chang
pp. 329-337
[Abstract]


S&M0377
Behavior of the Developing Process for Ultradeep Microstructures
Cheng-Tang Pan, Hsiharng Yang, Horng-Jee Wang and Min-Chieh Chou
pp. 339-347
[Abstract]


S&M0378
Ultralow-Stress Silicon-Rich Nitride Films for Microstructure Fabrication
Ming-Cheng Cheng, Chin-Piao Chang, Wen-Sheh Huang and Ruey-Shing Huang
pp. 349-358
[Abstract]

 

S&M0379
Fabrication of 3-D Microcoils with Ferromagnetic Cores Using a Standard CMOS Process
Lungjieh Yang, Kuangyeu Hsieh, Jinghung Chiou, Jennyi Chen, Chienliu Chang and Peizen Chang
pp. 359-367
[Abstract]

 

S&M0380
Fabrication of a Sensitive Germanium Microbolometer for Tympanic Thermometry
Chung-Nan Chen and Jin-Shown Shie
pp. 369-382
[Abstract]

 

S&M0381
Fabrication and Study of a Shallow-Gap Pirani Vacuum Sensor with a Linearly Measurable Atmospheric Pressure Range
Bruce C. S. Chou, Chung-Nan Chen and Jin-Shown Shie
pp. 383-392
[Abstract]

  




Copyright(C) MYU K.K. All Rights Reserved.