Sensors and Materials
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Sensors and Materials
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Sensors and Materials  ISSN 0914-4935

Volume 10 (1998)
Number 7

Special Issue on CAD for MEMS
Guest Editor, Jan G. Korvink (Albert Ludwigs University of Freiburg)


Research Reports

S&M0341
The Sensor Cube Revisited
Simon Middelhoek
pp. 397-404
[Abstract]


S&M0342
Application of Harmonic Finite Element Analysis to a CMOS Heat-Capacity Measurement Structure
Markus Emmenegger, Jan G. Korvink, Martin Bächtold, Martin von Arx, Oliver Paul and Henry Baltes
pp. 405-412
[Abstract]


S&M0343
Dynamic Modeling of a Tunable Microgyroscope
Myung-Seok Kang, Sung-Kie Youn, Young-Ho Cho and Ki Bang Lee
pp. 413-424
[Abstract]


S&M0344
CAD for Silicon Anisotropic Etching –Effect of Etching Products and Diffusion-
Osamu Tabata
pp. 425-433
[Abstract]

 

S&M0345
Circuit Modeling and SPICE Simulation of Mixed-Signal Microsystems
Hoan H. Pham and Arokia Nathan
pp. 435-460
[Abstract]

 




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