Sensors and Materials
Sensors and Materials
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Sensors and Materials  ISSN 0914-4935

Volume 10 (1998)
Number 4

Special Issue on ASDAM '96
Guest Editor, Tibor Lalinský (Conference Chairman)

Research Reports

Anisotropic Etching of Silicon in Saturated TMAHW Solutions for IC-Compatible Micromachining
P. M. Sarro, S. Brida, C. M. A. Ashruf, W. v. d. Vlist and H. v. Zeijl
pp. 201-212

Wet Etching of InGaP and GaAs in HCl: H3PO4: H2O2
Jaroslava Škriniarová, Jaroslav Kováč, Juraj Breza and Dagmar Gregušová
pp. 213-218

Chemically Amplified Deep UV Resists for Micromachining Using Electron Beam Lithography and Dry Etching
Peter Hudek, Ivaylo W. Rangelow, Ivan Kostic, Günther Stangl, Piotr B. Grabiec, Emil W. Rangelow, Miro Belov and Feng Shi
pp. 219-227

Supported BLM Microprobe with Thin-Film Ag/AgCl Reference Electrode for pH Measurements
Vlastimil Rehacek, Ivan Novotny, Vladimir Tvarozek, Fedor Mika, Waldemar Ziegler, Angelica Ottova-Leitmannova and H. Ti Tien
pp. 229-239


Power Sensor Microsystem Technology and Characterization
Tibor Lalinský, Štefan Haščík, Želmíra Mozolová, Ján Kuzumík and Zacharias Hatzopoulos
pp. 241-250


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