Sensors and Materials
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Sensors and Materials
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Sensors and Materials  ISSN 0914-4935

Volume 10 (1998)
Number 4

Special Issue on ASDAM '96
Guest Editor, Tibor Lalinský (Conference Chairman)


Research Reports

S&M0324
Anisotropic Etching of Silicon in Saturated TMAHW Solutions for IC-Compatible Micromachining
P. M. Sarro, S. Brida, C. M. A. Ashruf, W. v. d. Vlist and H. v. Zeijl
pp. 201-212
[Abstract]


S&M0325
Wet Etching of InGaP and GaAs in HCl: H3PO4: H2O2
Jaroslava Škriniarová, Jaroslav Kováč, Juraj Breza and Dagmar Gregušová
pp. 213-218
[Abstract]


S&M0326
Chemically Amplified Deep UV Resists for Micromachining Using Electron Beam Lithography and Dry Etching
Peter Hudek, Ivaylo W. Rangelow, Ivan Kostic, Günther Stangl, Piotr B. Grabiec, Emil W. Rangelow, Miro Belov and Feng Shi
pp. 219-227
[Abstract]


S&M0327
Supported BLM Microprobe with Thin-Film Ag/AgCl Reference Electrode for pH Measurements
Vlastimil Rehacek, Ivan Novotny, Vladimir Tvarozek, Fedor Mika, Waldemar Ziegler, Angelica Ottova-Leitmannova and H. Ti Tien
pp. 229-239
[Abstract]

 

S&M0328
Power Sensor Microsystem Technology and Characterization
Tibor Lalinský, Štefan Haščík, Želmíra Mozolová, Ján Kuzumík and Zacharias Hatzopoulos
pp. 241-250
[Abstract]

 




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