Sensors and Materials
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Sensors and Materials
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Sensors and Materials  ISSN 0914-4935

Volume 9 (1997)
Number 8

Special Issue: Resonant Microsensors

Research Reports

S&M0306
Fundamentals and State of the Art
M. J. Tudor and S. P. Beeby
pp. 457-471
[Abstract]


S&M0307
Silicon Resonant Pressure Sensors – A Market Perspective –
Janusz Bryzek and Joseph R. Mallon Jr.
pp. 473-500
[Abstract]


S&M0308
Analytical and Finite-Element Modeling of Resonant Silicon Microsensors
Thomas Fabula and Stephanus Büttgenbach
pp. 501-519
[Abstract]


S&M0309
Excitation and Detection of Silicon-Based Micromechanical Resonators
Harrie A. C. Tilmans and Siebe Bouwstra
pp. 521-540
[Abstract]

 




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