Sensors and Materials
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Sensors and Materials
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Sensors and Materials  ISSN 0914-4935

Volume 9 (1997)
Number 7

Special Issue: Canadian Workshop on Micro Electro Mechanical Systems (2)

Research Reports

S&M0301
Anisotropic Wet Chemical Etching of Si for Chemical Analysis Applications
Vassili Karanassios and George Mew
pp. 395-416
[Abstract]


S&M0302
Variation of Under-Etched Planes Appearing in Bulk-Micromachined Silicon Using TMAH Etchant
Les M. Landsberger, Mojtaba Kahrizi, Makarand Paranjape and Sasan Naseh
pp. 417-426
[Abstract]


S&M0303
In situ Ultrasound-Assisted Etching of <100> Si Wafers by KOH
Vassili Karanassios, Jonathan T. Sharples and Arokia Nathan
pp. 427-436
[Abstract]


S&M0304
Cellular Automata Modeling in MEMS Design
Ted J. Hubbard and Erik K. Antonsson
pp. 437-448
[Abstract]


Letter

S&M0305
Thermodynamic Treatment of Mechanical Stress Gradients in Coupled Electro-Thermo-Mechanical Systems
Koorosh Aflatooni, Richard Hornsey and Arokia Nathan
pp. 449-456
[Abstract]




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