Sensors and Materials
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Sensors and Materials
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Sensors and Materials  ISSN 0914-4935

Volume 4 (1992)
Number 5

Special Issue on Silicon Mechanical Sensors
Guest Editors, Kenichiro Suzuki (NEB Corporation)


Research Reports

S&M0114
Photo-Induced Preferential Anodization for Micromachining
Takashi Yoshida, Takahiro Kudo and Kyoichi Ikeda
pp. 229-238
[Abstract]


S&M0115
Measurement of Young's Modulus, Residual Stress, and Air Damping Effect Using Silicon Microstructures
Hiroyuki Okada, Kenichiro Suzuki and Toshihide Kuriyama
pp. 239-249
[Abstract]


S&M0116
Surface Micromachined Physical Sensors
Henry Guckel
pp. 251-264
[Abstract]


S&M0117
Surface-Micromachined Microdiaphragm Pressure Sensors
Susumu Sugiyama, Keiichi Shimaoka and Osamu Tabata
pp. 265-275
[Abstract]


S&M0118
Hybrid-Type Capacitive Pressure Sensor
Heedon Seo, Geunbae Lim and Masayoshi Esashi
pp. 277-289
[Abstract]





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