Sensors and Materials
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Sensors and Materials
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Sensors and Materials  ISSN 0914-4935

Volume 3 (1991)
Number 6

Research Reports

S&M0088
Deep Dry Etching of Silicon –A Novel Micromachining Tool
C. Linder, T. Tschan and N. F. de Rooij
pp. 311-324
[Abstract]


S&M0089
Thermoelectric Properties of Polysilicon Films Doped with Phosphorus and Boron
F. Völklein and H. Baltes
pp. 325-334
[Abstract]


S&M0090
Pressure Sensor Using Polycrystalline Silicon Thin Film Strain Gauge with Hybrid IC Amplifier
Fujio Sato, Yukio Sakamoto, Hisayoshi Hashimoto and Morio Tamura
pp. 335-343
[Abstract]


S&M0091
Photolithography on Microstructured Surfaces Using Photosensitive Polyimide
J. Muñoz, R. E. G. van Hal and P. Bergveld
pp. 345-358
[Abstract]





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