Sensors and Materials
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Sensors and Materials  ISSN 0914-4935

Volume 3 (1991)
Number 4

Research Reports

S&M0080
Analytical and FEM Modeling of Piezoresistive Silicon Accelerometers: Predictions and Limitations Compared to Experiments
Thomas Tschan, Nico de Rooij and Alex Bezinge
pp. 189-203
[Abstract]


S&M0081
Shape Memory Ceramics and Their Application to Latching Relays
Atsushi Furuta, Ki-Young Oh and Kenji Uchino
pp. 205-215
[Abstract]


S&M0082
Thermal Actuation of Clamped Silicon Microbeams
Theo S. J. Lammerink, Miko Elwenspoek and Jan H. J. Fluitman
pp. 217-238
[Abstract]


S&M0083
Humidity Sensitivity and Sputtering Conditions of ZnO Films
Manabu Sato and Tatsuo Yamamoto
pp. 239-247
[Abstract]





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