Published: April 13, 2018
Gas Sensing System Composed of IC-Foundry-Compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing [PDF]
Xin Peng, Yanqing Lv, Pengcheng Xu, Xinxin Li, Haitao Yu, and Jiaqiang Xu
(Received November 4, 2017; Accepted February 13, 2018)
Keywords: MEMS, gas sensor, microcantilever, MOF-5, PLL
Gas sensors based on resonant microcantilevers have drawn significant attention in the application of trace molecule detection. In order to realize the practical application of microcantilever-based sensors, three critical points still must be addressed: inexpensive and batch-fabricated microcantilevers, high-performance sensing material and easily operated signal-processing circuit with intelligent software. Herein, a gas sensing system with a multi-and-interdisciplinary collaboration mode is proposed. A low-cost and IC-foundry-compatible fabrication technology of the resonant microcantilever is developed. For the example of trace aniline detection, a scalable metal-organic-framework (MOF) material of MOF-5 with ultrahigh surface area and abundant specific aniline-adsorption sites is prepared. For sensing signal processing, an interface circuit with intelligent data processing capability is designed. Composed of the low-cost microcantilever, the advanced MOF-5 sensing material, and the intelligent signal process, the new gas sensing system shows satisfactory performance for trace aniline vapor detection.
Corresponding author: Xinxin Li, Haitao Yu, Jiaqiang Xu
Cite this article
Xin Peng, Yanqing Lv, Pengcheng Xu, Xinxin Li, Haitao Yu, and Jiaqiang Xu, Gas Sensing System Composed of IC-Foundry-Compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing , Sens. Mater., Vol. 30, No. 4, 2018, p. 757-766.