Sensors and Materials

ISSN 0914-4935

Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.

Tweets by Journal_SandM Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

Guidelines
English 日本語

Template
English

General Notes on Format
English

Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547

MYU Research
(proofreading and recording)

MYU K.K.
(translation service)

The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)

pp. 1091-1101
S&M1566
https://doi.org/10.18494/SAM.2018.1786
Published: May 31, 2018

Surface Texture Characterization Using Optical and Tactile Combined Sensor [PDF]

Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, and Masayuki Sohgawa

(Received October 26, 2017; Accepted February 7, 2018)

Keywords: optical proximity sensor, tactile sensor, combination sensing, texture characterization

Measurements of the surface texture of objects, including optical and tactile features, using a multimodal micro-electromechanical systems (MEMS) sensor are reported in this paper. The proposed MEMS sensor has two functions in its structure: light sensitivity of the MOS structure in the Si substrate and force sensitivity of the strain resistance gauge on microcantilevers embedded in the elastomer. Deflection of the cantilever, induced by an applied force, can be detected as a DC resistance change of the strain gauge film, which depends on the tactile texture including hardness, thickness, and surface roughness of the object. On the other hand, reflected light from the object, detected as AC impedance change at 5 MHz, depends on color of the object. It is confirmed that the resistance and impedance changes correlate with the physical and optical properties of the object, respectively. Therefore, it has been demonstrated that the surface texture of the object, including optical and tactile features, can be characterized using a single MEMS sensor.

Corresponding author: Masayuki Sohgawa

Cite this article
Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, and Masayuki Sohgawa, Surface Texture Characterization Using Optical and Tactile Combined Sensor, Sens. Mater., Vol. 30, No. 5, 2018, p. 1091-1101.