Sensors and Materials
ISSN 0914-4935

Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

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Sensors and Materials,
Volume 30, Number 3(1) (2018)

Copyright(C) MYU K.K. All Rights Reserved.
pp. 355-363
S&M1497
https://doi.org/10.18494/SAM.2018.1754
Published: February 28, 2018

Manufacturing Process Technology of Dual-wavelength Laser Direct-write Nanolithography System for Gold-nanoparticle-based Localized Surface Plasma Resonance Biosensor [PDF]

Hsing-Cheng Yu, Shuen-Chen Chen, and Ding-Zheng Lin

(Received July 11, 2017; Accepted November 21, 2017)

Keywords: biosensor, dual wavelength, localized surface plasma resonance, nanolithography

Recently, in vitro diagnostics (IVD) has been widely applied in the qualitative and quantitative analyses of medical diagnoses and drug development in biomedical technology. There are ~50% global IVD markets including immunoassay, molecular diagnostics, point-of-care testing, and biosensor detection. Therefore, the development of a manufacturing process technology for biosensor detection that is cost-effective and highly sensitive is important. In general, the biochip development of metal nanostructure arrays adopting localized surface plasma resonance (LSPR) is based on mechanical nanolithography with a tip of an atomic force microscope. However, it does not improve the irregular shapes and dimensions during the mass production of biochips, and does not increase the process area, so sensitivity is sacrificed. In this paper, we present a novel dual-wavelength laser direct-write nanolithography system for fabricating periodic gold nanoparticle arrays on substrates for biosensors. The substrates were immersed by a wet etching method after exposure. Isotropic etching using oxygen-plasma method transfer to the substrates was then performed to fabricate a suitable undercut in the lift-off of the dry etching process. The pitch, depth, and width of the periodic gold nanoparticle arrays were 500, 43, and 197 nm, respectively, and the measured transmission spectrum was 800 nm. Chips based on the periodic gold nanoparticle arrays were designed for LSPR biosensors with high sensitivity, to be widely applied in biomedical fields.

Corresponding author: Hsing-Cheng Yu


Cite this article
Hsing-Cheng Yu, Shuen-Chen Chen, and Ding-Zheng Lin, Manufacturing Process Technology of Dual-wavelength Laser Direct-write Nanolithography System for Gold-nanoparticle-based Localized Surface Plasma Resonance Biosensor, Sens. Mater., Vol. 30, No. 3, 2018, p. 355-363.


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